The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2021
Filed:
Dec. 21, 2016
Applicant:
Ngk Insulators, Ltd., Nagoya, JP;
Inventors:
Assignee:
NGK Insulators, Ltd., Nagoya, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 4/11 (2016.01); H01J 37/32 (2006.01); C23C 4/134 (2016.01); C23C 4/129 (2016.01);
U.S. Cl.
CPC ...
H01J 37/32495 (2013.01); C23C 4/11 (2016.01); C23C 4/129 (2016.01); C23C 4/134 (2016.01);
Abstract
A MgO-based ceramic film according to the present invention contains crystalline phases of MgO and MgAlO, and Al is dissolved in the MgO to form a solid-solution. The ceramic film exhibits a diffraction peak representing the (200) plane of MgO at an angleθ of more than 42.92° in CuKα XRD measurement. A shoulder preferably appears on the higher angle side of the peak representing the (200) plane of MgO. The mass ratio MgO/AlOof MgO to AlOconverted from Mg and Al in terms of oxides is preferably higher than 2.33.