The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2021
Filed:
Sep. 03, 2019
Toshiba Memory Corporation, Tokyo, JP;
Hiroshi Oota, Yokkaichi Mie, JP;
TOSHIBA MEMORY CORPORATION, Tokyo, JP;
Abstract
According to one embodiment, an inspection device includes a stage on which a substrate having a protrusion portion on a surface thereof is mountable. A ring member presses an outer periphery of the substrate on the stage. A liquid supply unit supplies a liquid on the surface of the substrate from the surface thereof to a first height. An imaging unit captures an image of a surface of the liquid and the protrusion portion from above the surface of the substrate. An arithmetic operation unit determines a size of an exposed portion of the protrusion portion which is exposed from the surface of the liquid by using the image obtained from the imaging unit, and determines a height of the protrusion portion on the basis of the size of the exposed portion.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile