The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 19, 2021

Filed:

Jan. 15, 2020
Applicant:

Reno Technologies, Inc., Wilmington, DE (US);

Inventor:

Michael Gilliam Ulrich, Delran, NJ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 25/04 (2006.01); H01L 21/67 (2006.01); H01L 21/3065 (2006.01); H01J 37/32 (2006.01); H03J 7/02 (2006.01);
U.S. Cl.
CPC ...
G01R 25/04 (2013.01); H01J 37/32183 (2013.01); H01L 21/3065 (2013.01); H01L 21/67069 (2013.01); H03J 7/02 (2013.01);
Abstract

In one embodiment, a phase detection circuit includes a current signal input to receive a current signal indicative of a current amplitude of an RF signal and a voltage signal input to receive a voltage signal indicative of a voltage amplitude of the RF signal. A high-pass filter and a low-pass filter are each configured to filter one of (i) the current signal from the current signal input or (ii) the voltage signal from the voltage signal input, wherein the high-pass filter and the low-pass filter collectively cause a substantially 90 degree offset between a phase angle of the current signal and a phase angle of the voltage signal. A phase difference circuit receives the filtered current signal and the filtered voltage signal to determine a phase angle difference between the current signal and the voltage signal.


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