The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2021
Filed:
Aug. 11, 2016
Atlantic Inertial Systems Limited, Plymouth, GB;
Alan Malvern, Plymouth, GB;
ATLANTIC INERTIAL SYSTEMS LIMITED, Plymouth, GB;
Abstract
An angular velocity sensor comprises: an insulative support layer (); a substrate layer () formed of a silica-based material and comprising a planar ring structure () mounted to vibrate in-plane; and a plurality of conductive electrodes (), each comprising a first set of moveable conductive electrode tracks () formed on a surface of the planar ring and a second set of fixed conductive electrode tracks () formed on a surface of the insulative support layer axially spaced from the surface of the planar ring. The first and second sets of conductive electrode tracks are interdigitated with a lateral spacing between them in a radial direction. Each moveable conductive electrode track has a radial offset from a median line between adjacent fixed conductive electrode tracks such that each moveable conductive electrode track has a different lateral spacing from two different adjacent fixed conductive electrode tracks in opposite radial directions.