The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 19, 2021

Filed:

Jul. 24, 2018
Applicants:

Boe Technology Group Co., Ltd., Beijing, CN;

Ordos Yuansheng Optoelectronics Co., Ltd., Ordos, CN;

Inventors:

Xinjian Zhang, Beijing, CN;

Liguo Liu, Beijing, CN;

Zhi Yin, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01); H01L 51/00 (2006.01); B05C 21/00 (2006.01); H01L 51/56 (2006.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); B05C 21/005 (2013.01); H01L 51/0011 (2013.01); H01L 51/56 (2013.01);
Abstract

A mask plate and manufacturing method thereof, a mask assembly and a vapor deposition apparatus are provided. The mask plate includes a mask pattern region, and a peripheral region of the mask pattern region, the peripheral region including a recess structure, and a recess direction of the recess structure being parallel to a thickness direction of the mask plate. When the glass substrate is superposed on the mask plate, the force suffered by the glass substrate at the weld pad is reduced, and the probability of scratching the glass substrate is lowered.


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