The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 19, 2021

Filed:

May. 16, 2018
Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Alexander Breymesser, Villach, AT;

Andre Brockmeier, Villach, AT;

Carsten von Koblinski, Bodensdorf, AT;

Francisco Javier Santos Rodriguez, Villach, AT;

Assignee:

Infineon Technologies AG, Neubiberg, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/56 (2006.01); H01L 23/29 (2006.01); H01L 23/31 (2006.01); G02B 6/12 (2006.01); C03B 11/08 (2006.01); C03B 40/02 (2006.01); B81C 99/00 (2010.01);
U.S. Cl.
CPC ...
B81C 99/008 (2013.01); C03B 11/082 (2013.01); C03B 40/02 (2013.01); H01L 21/56 (2013.01); H01L 23/3178 (2013.01); B81C 2201/034 (2013.01); C03B 2215/07 (2013.01); C03B 2215/79 (2013.01); G02B 2006/12038 (2013.01); H01L 23/291 (2013.01); H01L 2924/0002 (2013.01); Y10T 428/24479 (2015.01);
Abstract

A semiconductor element is formed in a mesa portion of a semiconductor substrate. A cavity is formed in a working surface of the semiconductor substrate. The semiconductor substrate is brought in contact with a glass piece made of a glass material and having a protrusion. The glass piece and the semiconductor substrate are arranged such that the protrusion extends into the cavity. The glass piece is bonded to the semiconductor substrate. The glass piece is in-situ bonded to the semiconductor substrate by pressing the glass piece against the semiconductor substrate. During the pressing a temperature of the glass piece exceeds a glass transition temperature and the temperature and a force exerted on the glass piece are controlled to fluidify the glass material and after re-solidifying the protrusion completely fills the cavity.


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