The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2021
Filed:
May. 29, 2018
Tdk Corporation, Tokyo, JP;
Tsutomu Okabe, Tokyo, JP;
Hiroshi Igarashi, Tokyo, JP;
TDK CORPORATION, Tokyo, JP;
Abstract
An EFEM includes first and second chambers, an airflow formation unit, a gas discharge port, and first and second nozzles. The first chamber introduces a replacement gas. The second chamber is connected with the first chamber via first and second communication sections. In the first communication section, a filter is disposed, and the replacement gas inflows from the first chamber. In the second communication section, the replacement gas outflows into the first chamber. The airflow formation unit produces a circulating airflow between the first and second chambers. The gas discharge port discharges an internal gas from the first or second chamber. The first nozzle discharges the replacement gas supplied from a replacement gas supply source into the first chamber through a first opening. The second nozzle discharges the replacement gas supplied from the source through a second opening.