The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2021
Filed:
Mar. 13, 2020
Tdk Corporation, Tokyo, JP;
Tadamasa Iwamoto, Tokyo, JP;
TDK CORPORATION, Tokyo, JP;
Abstract
A load port apparatus includes a mount member, a purge nozzle, and a plurality of pins. The mount member mounts a container. The nozzle introduces a cleaning gas into the container mounted on the mount member via a purge port disposed on a bottom of the container. The pins support the container from below by each contacting with a predetermined position of the bottom of the container. The pins are relatively vertically movable to the mount member between a first position and a second position where an upper tip of each of the pins is located lower than that at the first position. The upper tip of each of the pins at the first position contacts with the predetermined position of the container. The upper tip of each of the pins at the second position contacts with the predetermined position of the container.