The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2021
Filed:
Dec. 28, 2018
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Assignee:
CANON KABUSHIKI KAISHA, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); H01L 21/027 (2006.01); B29C 59/00 (2006.01); B29C 59/02 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B29C 59/002 (2013.01); B29C 59/026 (2013.01); H01L 21/0271 (2013.01);
Abstract
Provided is an ejection device and an imprint apparatus which can suppress ejection failures and breakage of a mold. To achieve this, a circulation mechanism including a degassing unit is provided in an ejection head.