The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2021
Filed:
Oct. 02, 2019
Applicant:
Nanya Technology Corporation, New Taipei, TW;
Inventors:
Hsueh-Han Lu, New Taipei, TW;
Jui-Hsiu Jao, Taoyuan, TW;
Assignee:
NANYA TECHNOLOGY CORPORATION, New Taipei, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2020.01); G01R 27/26 (2006.01); H01L 23/522 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2607 (2013.01); G01R 27/2605 (2013.01); H01L 23/5222 (2013.01);
Abstract
A testing structure is disclosed. The testing structure includes a first layer, a second layer, and a third layer. The first layer includes a first pattern. The third layer includes a second pattern. The first layer, the second layer, and the third layer overlap each other. The second layer is connected to a CBCM (charged based capacitance measurement) testing circuit.