The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 12, 2021

Filed:

Jan. 30, 2019
Applicant:

Atlantic Inertial Systems, Limited, Plymouth, GB;

Inventors:

Kevin Townsend, Liskeard, GB;

Michael Terence Durston, Plymouth, GB;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/08 (2006.01); G01P 1/02 (2006.01); B81B 7/00 (2006.01); G01C 19/5783 (2012.01); G01C 21/16 (2006.01);
U.S. Cl.
CPC ...
G01P 15/0802 (2013.01); B81B 7/0074 (2013.01); G01C 19/5783 (2013.01); G01C 21/16 (2013.01); G01P 1/023 (2013.01);
Abstract

A method of manufacturing an inertial measurement unit (IMU) comprises fabricating a plurality of individual MEMS inertial sensor packages at a package level as sealed packages containing a MEMS inertial sensor chip and an integrated circuit electrically connected together. Fabricating the individual MEMS inertial sensor packages comprises forming mechanical interconnect features in each package and assembling the IMU by mechanically interconnecting each individual MEMS inertial sensor package with another individual MEMS inertial sensor package in a mutually orthogonal orientation.


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