The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 12, 2021

Filed:

Mar. 14, 2019
Applicant:

3m Innovative Properties Company, St. Paul, MN (US);

Inventor:

David L. Hofeldt, Oakdale, MN (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/3586 (2014.01); G01B 11/06 (2006.01);
U.S. Cl.
CPC ...
G01N 21/3586 (2013.01); G01B 11/06 (2013.01);
Abstract

A time-domain terahertz (THz) measurement system includes a single reference surface. A reference beam providing the single reference surface is supported at two mounting points, at least one of which is a non-fixed mounting point to allow for thermal expansion of the reference beam. The system acquires an air scan profile of the single reference surface with no sample present at a first time, and a sample scan profile with the sample present at a second time. The system further performs a linear correction of the air scan profile using distance measurements at two reference points outside the boundaries of the sample collected at the time of acquisition of the air scan profile and the sample scan profile. The system measures one or more properties of a sample, including, for example, a thickness profile of the sample and an effective refractive index profile of the sample.


Find Patent Forward Citations

Loading…