The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 12, 2021

Filed:

Nov. 12, 2018
Applicant:

Harbin Institute of Technology, Harbin, CN;

Inventors:

JianWei Wu, Harbin, CN;

ZhongPu Wen, Harbin, CN;

PengCheng Hu, Harbin, CN;

Yin Zhang, Harbin, CN;

JiWen Cui, Harbin, CN;

JiuBin Tan, Harbin, CN;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 5/38 (2006.01); F16C 32/06 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G01D 5/38 (2013.01); F16C 32/0607 (2013.01); G03F 7/70758 (2013.01); G03F 7/70775 (2013.01); F16C 2370/00 (2013.01);
Abstract

A cantilever linear motion reference device employing two-layer air suspension. By means of a two-layer force sealed air suspension structure, the invention realizes two-dimensional air suspension support and motion guiding and improves the rotational stiffness per unit for an air suspension working surface. By combining accurate driving and feedback control, the invention achieves high speed, high acceleration, high frequency motion, and enables construction of a small-volume, long cantilever, high torque load two-dimensional motion reference device.


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