The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2021
Filed:
Apr. 23, 2019
Applicant:
Uchicago Argonne, Llc, Chicago, IL (US);
Inventors:
Anil U. Mane, Naperville, IL (US);
Devika Choudhury, Naperville, IL (US);
Jeffrey W. Elam, Elmhurst, IL (US);
Steven Payonk Letourneau, Naperville, IL (US);
Assignee:
UChicago Argonne, LLC, Chicago, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/56 (2006.01); C23C 16/14 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/56 (2013.01); C23C 16/14 (2013.01); C23C 16/45527 (2013.01); C23C 16/45553 (2013.01);
Abstract
An ultra-thin film transition metal dichalcogenide ('TMD') supported on a support. The TMD is formed from a metal grown by atomic layer deposition ('ALD') on a substrate. The metal is sulphurized to produce a TMD ultra-thin layer.