The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2021
Filed:
Jun. 28, 2018
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Yukimune Watanabe, Hokuto, JP;
Noriyasu Kawana, Matsumoto, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 33/08 (2006.01); C23C 16/32 (2006.01); C30B 25/18 (2006.01); C30B 29/04 (2006.01); C30B 29/36 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C23C 16/325 (2013.01); C30B 25/18 (2013.01); C30B 29/04 (2013.01); C30B 29/36 (2013.01); C30B 33/08 (2013.01); H01L 21/0262 (2013.01);
Abstract
A single crystal substrate is provided and is characterized in that the single crystal substrate has a foundation substrate provided with a plurality of grooves, which include a first crystal face and a second crystal face opposed to the first crystal face in an inner face thereof, and the extending direction of which is a <110> direction, and an angle formed by the first crystal face and the second crystal face is more than 70.6°. Further, it is preferred that the angle formed by the first crystal face and the second crystal face is 100° or more and 176° or less.