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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11142484 B1

PDFFull Text
Expired
Date of Patent:
Oct. 12, 2021

Filed:

Jul. 13, 2017

Component for semiconductor production device, and production method of component for semiconductor production device

Applicant:

Ngk Spark Plug Co., Ltd., Nagoya, JP;

Inventors:

Kohei Mitsuya, Inuyama, JP;

Hideo Tange, Ichinomiya, JP;

Motoki Hotta, Kasugai, JP;

Takamichi Ogawa, Nagoya, JP;

Assignee:

NGK SPARK PLUG CO., LTD., Nagoya, JP;

Attorneys:

Stites & Harbison, PLLC

Jeffrey A. Haeberlin

James R. Hayne

Primary Examiner:

Daniel J Schleis

Assistant Examiner:

Kevin Ct Li

Int. Cl.
CPC ...
C04B 35/10 (2006.01); C04B 37/00 (2006.01); H01L 21/687 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C04B 37/001 (2013.01); C04B 35/10 (2013.01); C04B 37/00 (2013.01); H01L 21/67103 (2013.01); H01L 21/68714 (2013.01); H01L 21/68757 (2013.01); H01L 21/68792 (2013.01); C04B 2237/343 (2013.01);
Abstract

A semiconductor production device component includes a first ceramic member including an AlN-based material, a second ceramic member including an AlN-based material, and a joint layer disposed between the first ceramic member and the second ceramic member so as to join the first ceramic member and the second ceramic member to each other. The joint layer includes a composite oxide containing Gd and Al, and AlO, and is free from AlN.

Find Patent Forward Citations

Mitsuya, Kohei. (2021). Component for semiconductor production device, and production method of component for semiconductor production device (U.S. Patent No. 11142484). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11142484

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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