The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2021
Filed:
Jun. 06, 2019
Applicant:
Tdk Corporation, Tokyo, JP;
Inventors:
Klaus Mayer, Munich, DE;
Christian Siegel, Tuntenhausen, DE;
Anton Leidl, Hohenbrunn, DE;
Wolfgang Pahl, Munich, DE;
Stefan Stufler, Munich, DE;
Assignee:
TDK CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); B81B 3/00 (2006.01); H01L 23/00 (2006.01); B81B 7/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00325 (2013.01); B81B 3/0072 (2013.01); B81B 7/0048 (2013.01); B81C 1/00134 (2013.01); H01L 24/48 (2013.01); B81C 2203/01 (2013.01); H01L 2224/48247 (2013.01); H01L 2224/73257 (2013.01);
Abstract
A MEMS device is disclosed. In an embodiment a MEMS device includes a substrate having an active region and at least one integrated electrical and mechanical connection element configured to electrically and mechanically mount the MEMS device to a carrier, wherein the connection element comprises a stress-reducing structure.