The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2021
Filed:
Aug. 29, 2017
Christian Wolfgang Ehmann, Darmstadt, DE;
Britta Späh, Deidesheim, DE;
Martin Aenis, Darmstadt, DE;
Timo Adler, Gernsheim, DE;
Applied Materials, Inc., Santa Clara, CA (US);
Christian Wolfgang Ehmann, Darmstadt, DE;
Britta Späh, Deidesheim, DE;
Martin Aenis, Darmstadt, DE;
Timo Adler, Gernsheim, DE;
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
An apparatus for holding, positioning and/or moving an object is described. The apparatus includes a base, and a carrier which is movable relative to the base. The apparatus further includes at least three magnetic bearings, by means of which the carrier is supported on the base in a contactless manner such that the carrier can be displaced with respect to at least one predefined direction, wherein at least two of the magnetic bearings are configured as actively controllable magnetic bearings. The apparatus has at least one damping unit, which is fixed to the carrier or to the base.