The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2021
Filed:
Sep. 03, 2019
Applicant:
Toshiba Memory Corporation, Tokyo, JP;
Inventors:
Masayuki Kitamura, Yokkaichi Mie, JP;
Atsushi Kato, Yokkaichi Mie, JP;
Assignee:
TOSHIBA MEMORY CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/12 (2006.01); H01L 23/48 (2006.01); H01L 21/4763 (2006.01); H01L 23/532 (2006.01); H01L 23/522 (2006.01); H01L 21/768 (2006.01); H01L 21/48 (2006.01); H01L 23/528 (2006.01); H01L 27/11582 (2017.01);
U.S. Cl.
CPC ...
H01L 23/5329 (2013.01); H01L 21/486 (2013.01); H01L 21/7682 (2013.01); H01L 21/76802 (2013.01); H01L 21/76807 (2013.01); H01L 21/76843 (2013.01); H01L 21/76883 (2013.01); H01L 23/528 (2013.01); H01L 23/5226 (2013.01); H01L 23/53295 (2013.01); H01L 27/11582 (2013.01);
Abstract
According to one embodiment, a semiconductor device includes: a semiconductor substrate; a first via provided on the semiconductor substrate; a metal wiring provided on the first via; and a second via provided on the metal wiring. One of the side surfaces facing each other in the first direction of the metal wiring and one of the side surfaces facing each other in the first direction of the second via are aligned in the first direction.
Quick Actions:
Kitamura, Masayuki. (2021). Semiconductor device with aligned vias (U.S. Patent No. 11139246). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11139246
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile