The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2021
Filed:
Aug. 29, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Yan Rozenzon, San Carlos, CA (US);
Kyle Tantiwong, Livermore, CA (US);
Imad Yousif, San Jose, CA (US);
Vladimir Knyazik, Santa Clara, CA (US);
Bojenna Keating, Palo Alto, CA (US);
Samer Banna, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A gas injection system includes (a) a side gas plenum, (b) a plurality of N gas inlets coupled to said side gas plenum, (c) plural side gas outlets extending radially inwardly from said plenum, (d) an N-way gas flow ratio controller having N outputs coupled to said N gas inlets respectively, and (e) an M-way gas flow ratio controller having M outputs, respective ones of said M outputs coupled to said tunable gas nozzle and a gas input of said N-way gas flow ratio controller.