The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 05, 2021

Filed:

Jun. 28, 2018
Applicant:

Hitachi High-tech Corporation, Tokyo, JP;

Inventors:

Hiroshi Morita, Tokyo, JP;

Shinichi Kato, Tokyo, JP;

Hiroyuki Ito, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/07 (2006.01); H01J 37/248 (2006.01);
U.S. Cl.
CPC ...
H01J 37/07 (2013.01); H01J 37/248 (2013.01); H01J 2237/0206 (2013.01);
Abstract

Provided are a charged particle beam generator and a charged particle beam device that can improve insulation reliability as a result of reducing the high electric field generated around a connection section for a conductor. The charged particle beam generatorhas: a plugthat guides high voltage from outside to a charged particle source that is in a vacuum; and a sockethaving the charged particle source attached thereto. An electric field reduction ringthat electrically connects to one of a plurality of conductors that guide high voltage is embedded inside the tip of the plug. The plurality of conductors that guide the high voltage are arranged so as to penetrate the electric field reduction ring


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