The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2021
Filed:
Jan. 15, 2019
Stmicroelectronics S.r.l., Agrate Brianza, IT;
Luca Lamagna, Cassina de'Pecchi, IT;
Stefano Losa, Cornaredo, IT;
Silvia Rossini, Usmate Velate, IT;
Federico Vercesi, Milan, IT;
Elena Cianci, Cerveteri, IT;
Graziella Tallarida, Bergamo, IT;
Claudia Wiemer, Monza Brianza, IT;
STMicroelectronics S.r.l., Agrate Brianza, IT;
Abstract
A micromechanical mirror structure includes a mirror element designed to reflect an incident light radiation and a protective structure arranged over the mirror element to provide mechanical protection for the mirror element and to increase the reflectivity of the mirror element with respect to the incident light radiation. The protective structure has a first protective layer and a second protective layer which are stacked on the mirror element. The second protective layer is arranged on the first protective layer and the first protective layer is arranged on the mirror element. The layers include a respective dielectric material and having respective refractive indexes that jointly increase the reflectivity of the mirror element in a range of wavelengths of interest.