The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2021
Filed:
Dec. 06, 2018
Canon Kabushiki Kaisha, Tokyo, JP;
Canon Precision Inc., Hirosaki, JP;
Tsuguhide Sakata, Machida, JP;
Masahiro Ando, Yokohama, JP;
Hiroki Kobayashi, Hirosaki, JP;
Takuji Okamoto, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A stage apparatus that reduces generation of a slight movement of a stage position (observation position) when switching between the automatic mode and the manual mode. The stage apparatus comprises: a first stage; a second stage that moves relatively in a first direction on a surface of the first stage; a first driving unit configured for driving a first driven portion configured to move the second stage relatively in the first direction by a manual driving force; and a second driving unit configured for driving a second driven portion configured to move the second stage relatively in the first direction by an electromotive driving force, wherein the first driven portion and the second driven portion have a common operating axis at least partially.