The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 05, 2021

Filed:

Sep. 27, 2017
Applicant:

Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v., Munich, DE;

Inventors:

Thomas Lisec, Itzehoe, DE;

Hans-Joachim Quenzer, Itzehoe, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/12 (2006.01); G01N 27/16 (2006.01); G01F 1/684 (2006.01);
U.S. Cl.
CPC ...
G01N 27/16 (2013.01); G01F 1/6845 (2013.01); G01N 27/128 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/8592 (2013.01);
Abstract

This invention provides a microsystem comprising a porous thermal insulation body composed of particles of low thermal conductivity. The porous body isolates and stabilizes the microsystem.


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