The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 05, 2021

Filed:

Dec. 02, 2016
Applicant:

Azbil Corporation, Chiyoda-ku, JP;

Inventors:

Ayumi Tushima, Chiyoda-ku, JP;

Yoshiyuki Ishikura, Chiyoda-ku, JP;

Tomohisa Tokuda, Chiyoda-ku, JP;

Nozomi Kida, Chiyoda-ku, JP;

Yuki Seto, Chiyoda-ku, JP;

Assignee:

AZBIL CORPORATION, Chiyoda-ku, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 13/02 (2006.01); G01L 19/00 (2006.01); G01L 19/06 (2006.01);
U.S. Cl.
CPC ...
G01L 13/025 (2013.01); G01L 19/0061 (2013.01); G01L 19/0627 (2013.01);
Abstract

A sensor chip () is joined to an inner wall surface () of a base body (-), with a lower surface () of a first retaining member (-) serving as a joint surface, in such a manner as to allow an enclosing chamber () (including a pressure receiving chamber (-) and a pressure guiding passage (-)) between a pressure receiving diaphragm () and the joint surface () of the sensor chip () to communicate with a pressure guiding hole (-) in the first retaining member (-). In this state, a narrow tube () made of stainless steel is passed through the pressure guiding passage (-) in the base body (-) and inserted and secured in the pressure guiding hole (-) in the first retaining member (-). This reduces the pressure receiving area of a pressure guiding passage that guides a pressure (P) of a measured fluid to a first surface (-) of a sensor diaphragm (-), suppresses force applied in the direction of separating the joint between the sensor chip () and the base body (-), and makes it possible to use a soft adhesive.


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