The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2021
Filed:
May. 25, 2018
Applicant:
Qorvo Us, Inc., Greensboro, NC (US);
Inventor:
Alireza Tajic, Winter Springs, FL (US);
Assignee:
Qorvo US, Inc., Greensboro, NC (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/047 (2006.01); H03H 9/17 (2006.01); H03H 3/02 (2006.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
H03H 9/175 (2013.01); H03H 3/02 (2013.01); H03H 9/02118 (2013.01); H03H 2003/025 (2013.01);
Abstract
Embodiments provide a solidly-mounted bulk acoustic wave (BAW) resonator and method of making same. In embodiments, the BAW resonator may include a planarization portion in an inactive region of the BAW resonator that is coplanar with a piezoelectric layer of the BAW resonator in an active region of the BAW resonator. Other embodiments may be described and claimed.