The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 28, 2021

Filed:

May. 29, 2018
Applicant:

Kaneka Corporation, Osaka, JP;

Inventors:

Masanori Fukuda, Toyooka, JP;

Toshifumi Namiuchi, Toyooka, JP;

Takahiro Matsuda, Toyooka, JP;

Assignee:

KANEKA CORPORATION, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/18 (2006.01); H01L 31/046 (2014.01);
U.S. Cl.
CPC ...
H01L 31/182 (2013.01); H01L 31/046 (2014.12);
Abstract

A method of manufacturing a photoelectric conversion element according to the present disclosure includes: a first placement step in which a first semiconductor substrate on which a first thin film and a second thin film are not formed is placed in a first film forming place () in a first film forming chamber (); a second placement step in which a second semiconductor substrate on which the first thin film is formed on a first-principal-surface side and the second thin film is not formed on a second-principal-surface side is placed in a second film forming place () in the chamber (); and a first film forming step in which forming of the first thin film on the first-principal-surface side of the first semiconductor substrate and forming of the second thin film on the second-principal-surface side of the second semiconductor substrate are executed in the same period in the chamber ().


Find Patent Forward Citations

Fukuda, Masanori. (2021). Photoelectric conversion element production method (U.S. Patent No. 11133430). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11133430

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…