The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 28, 2021

Filed:

Dec. 13, 2016
Applicant:

Watlow Electric Manufacturing Company, St. Louis, MO (US);

Inventors:

Kevin R. Smith, Columbia, MO (US);

Kevin Ptasienski, O'Fallon, MO (US);

Ray Alan Derler, Ballwin, MO (US);

Cal T. Swanson, St. Louis, MO (US);

Philip S. Schmidt, Winona, MN (US);

Mohammad Nosrati, Redwood City, CA (US);

Jacob R. Lindley, St. Louis, MO (US);

Allen N. Boldt, Kirkwood, MO (US);

Sanhong Zhang, Ballwin, MO (US);

Louis P. Steinhauser, St. Louis, MO (US);

Dennis S. Grimard, Ann Arbor, MI (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/67 (2006.01); H05B 1/02 (2006.01); H05B 1/00 (2006.01); H05B 3/02 (2006.01); H01L 21/683 (2006.01); H05B 3/20 (2006.01); H05B 3/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67103 (2013.01); H01L 21/67098 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H01L 21/6833 (2013.01); H05B 1/00 (2013.01); H05B 1/02 (2013.01); H05B 1/0202 (2013.01); H05B 1/0227 (2013.01); H05B 1/0233 (2013.01); H05B 3/02 (2013.01); H05B 3/06 (2013.01); H05B 3/20 (2013.01); H05B 2203/005 (2013.01); H05B 2203/013 (2013.01); H05B 2213/03 (2013.01); Y10T 156/10 (2015.01);
Abstract

A thermal system includes a base member, a two-phase fluid, a tuning heater, and a chuck. The base member includes at least one fluid passageway. The two-phase fluid is disposed within the fluid passageway. A pressure of the two-phase fluid is controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. The tuning heater is secured to the base member. The chuck is secured to the tuning heater opposite to the base member. The tuning heater includes a plurality of zones to fine tune a heat distribution provided by the base member to the chuck.


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