The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2021
Filed:
Aug. 30, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Joseph M. Ranish, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01K 1/16 (2006.01); H01K 1/40 (2006.01); H01K 1/66 (2006.01); H05B 3/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01K 1/16 (2013.01); H01K 1/40 (2013.01); H01K 1/66 (2013.01); H05B 3/0038 (2013.01); H05B 3/0047 (2013.01); H01L 21/67115 (2013.01);
Abstract
Embodiments of the present invention generally relate to simplified, high voltage, tungsten halogen lamps for use as source of heat radiation in a rapid thermal processing (RTP) chamber or other lamp heated thermal processing chambers. Embodiments include a lamp design that includes an external fuse while reducing the number of part and expense of prior art lamps. In addition, embodiments of the lamps described herein provide sufficient rigidity to handle compressive forces of inserting the lamps into a heating assembly base, while maintaining a simplified fuse design.