The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 28, 2021

Filed:

Jun. 09, 2014
Applicant:

View, Inc., Milpitas, CA (US);

Inventors:

Trevor Frank, Milpitas, CA (US);

Robert T. Rozbicki, Germantown, TN (US);

Jason Satern, Morgan Hill, CA (US);

Assignee:

View, Inc., Milpitas, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 14/34 (2006.01); C23C 14/56 (2006.01); C23C 14/50 (2006.01); H01L 21/677 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32715 (2013.01); C23C 14/34 (2013.01); C23C 14/50 (2013.01); C23C 14/562 (2013.01); C23C 14/568 (2013.01); H01J 37/32651 (2013.01); H01J 37/32779 (2013.01); H01L 21/6734 (2013.01); H01L 21/6776 (2013.01); H01L 21/67712 (2013.01); H01J 2237/026 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/20221 (2013.01); H01J 2237/332 (2013.01);
Abstract

Pallets for transporting one or more glass substrates in a substantially vertical orientation through a sputtering system. In some cases, a pallet comprising a frame with an aperture and an adjustable grid array within the aperture. The adjustable grid array is configurable to hold a plurality of glass substrates of different shapes and/or sizes. In one case, the adjustable grid array comprises a system of vertical and horizontal support bars, wherein the vertical support bars configured to both support the plurality of glass substrates at their vertical edges, wherein the horizontal support bars are configured to support the plurality of glass substrates at their horizontal edges, wherein the ends of the horizontal support bars are slideably engaged with the vertical support bars.


Find Patent Forward Citations

Loading…