The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2021
Filed:
Apr. 10, 2019
Applicant:
Von Ardenne Asset Gmbh & Co. KG, Dresden, DE;
Inventor:
Carsten Deus, Dresden, DE;
Assignee:
VON ARDENNE Asset GmbH & Co. KG, Dresden, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/30 (2006.01); C23C 14/54 (2006.01); H01J 37/305 (2006.01); H01J 37/147 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3053 (2013.01); C23C 14/30 (2013.01); C23C 14/54 (2013.01); H01J 37/1475 (2013.01); H01J 2237/1526 (2013.01); H01J 2237/3132 (2013.01);
Abstract
According to various embodiments, a method for vaporizing a vaporization material by means of an electron beam may include the following: generating a first deflection pattern having a first power density at least on an end face of a rod-shaped vaporization material; and, subsequently, generating a second deflection pattern having a second power density on a portion of an outer edge of the rod-shaped vaporization material and a portion of an inner edge of a ring crucible, which encloses the rod-shaped vaporization material, wherein the second power density is greater than the first power density.