The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2021
Filed:
Dec. 20, 2019
Powerchip Semiconductor Manufacturing Corporation, Hsinchu, TW;
Chiu-Chieh Lin, Hsinchu, TW;
Ching-Ly Yueh, Hsinchu, TW;
Powerchip Semiconductor Manufacturing Corporation, Hsinchu, TW;
Abstract
The invention provides a wafer map identification method, which includes the following steps: obtaining a wafer map of at least one to-be-identified wafer; performing an image processing operation on the wafer map and a reference pattern, wherein the image processing operation includes: performing a convolution operation on the wafer map and the reference pattern respectively, extracting a critical feature of the wafer map after the convolution operation, and calculating a weight distribution based on the reference pattern after the convolution operation; and calculating a similarity between the processed wafer map and the processed reference pattern to identify the wafer map. The invention also provides a computer-readable recording medium recording the above identification method.