The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 28, 2021

Filed:

Oct. 10, 2018
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Christopher Ellis Jones, Austin, TX (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01);
Abstract

Systems and processes for controlling an imprinting process that dispenses a plurality of droplets onto a substrate. Droplet information representative of droplets is acquired. A set that includes droplet parameters of the droplets based on the droplet information may be estimated. Each of the droplet parameters is representative of particular droplets. Prior to a template being brought into contact with the droplets, either any of the set is outside ranges, or all of the set are inside ranges, may be determined. In a first case when any of the set are outside the ranges, then the imprinting process may be aborted prior to the template being brought into contact with the droplets. In a second case when all of the set are inside the ranges, then the imprinting process may be performed with the template.


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