The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2021
Filed:
May. 14, 2020
Applicant:
Murata Manufacturing Co., Ltd., Nagaokakyo, JP;
Inventors:
Assignee:
MURATA MANUFACTURING CO., LTD., Nagaokakyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/18 (2013.01); G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
G01P 15/125 (2013.01); G01P 15/18 (2013.01); B81B 2201/0235 (2013.01);
Abstract
A capacitive micromechanical accelerometer comprising a first proof mass, a second proof mass, a third proof mass and a fourth proof mass. Each proof mass is configured as a seesaw which undergoes rotation out of the xy-plane in response to z-axis acceleration. The four proof masses are suspended from the same central anchor point with torsionally flexible suspension arrangements. Errors introduced into the output signal by wafer bending can be automatically compensated in a differential capacitive measurement.