The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2021
Filed:
Apr. 30, 2018
Applicants:
Boe Technology Group Co., Ltd., Beijing, CN;
Hefei Xinsheng Optoelectronics Technology Co., Ltd., Anhui, CN;
Inventors:
Xin Xiang, Beijing, CN;
Zhiguang Guo, Beijing, CN;
Benxiang Hou, Beijing, CN;
Yunjie Wang, Beijing, CN;
Fan Yang, Beijing, CN;
Assignees:
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD., Hefei, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F27D 21/00 (2006.01); G01J 5/04 (2006.01); G01J 5/00 (2006.01); G01J 5/08 (2006.01); G01J 5/02 (2006.01);
U.S. Cl.
CPC ...
F27D 21/0014 (2013.01); G01J 5/0044 (2013.01); G01J 5/025 (2013.01); G01J 5/041 (2013.01); G01J 5/042 (2013.01); G01J 5/0887 (2013.01);
Abstract
A temperature monitoring system for a substrate heating furnace includes a temperature monitor, and the temperature monitor is located on a prong of a mechanical arm which is configured to fetch and place a substrate. The temperature monitor is configured to monitor the temperature of the substrate which has been heated by the substrate heating furnace and is located on the prong.