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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11131019 B1

PDFFull Text
Date of Patent:
Sep. 28, 2021

Filed:

Jul. 27, 2017

Apparatus for coating substrates

Applicant:

Ihi Hauzer Techno Coating B.v., LL Venlo, NL;

Inventors:

Don Derckx, BZ Beegden, NL;

Dave Doerwald, HP Nijmegen, NL;

Ruud Jacobs, XX Venlo, NL;

Marijn Gelten, TH Eindhoven, NL;

Assignee:

IHI Hauzer Techno Coating B.V.;

Attorney:

Dickinson Wright PLLC

Primary Examiner:

Michael A Band

Int. Cl.
CPC ...
C23C 14/34 (2006.01); C23C 14/50 (2006.01); C23C 14/54 (2006.01); H01J 37/34 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 14/541 (2013.01); C23C 14/34 (2013.01); C23C 14/505 (2013.01); H01J 37/32715 (2013.01); H01J 37/32724 (2013.01); H01J 37/32779 (2013.01); H01J 37/34 (2013.01);
Abstract

An apparatus for coating substrates includes a vacuum chamber having an opening through which substrates can be received and a door configured to seal the opening; one or more targets arranged in the vacuum chamber; a cooling unit configured to cool the substrates and/or a heating unit configured to heat the substrates; rotating means configured to rotate substrates relative to the one or more targets, the cooling unit and/or the heating unit; and a lifting chamber that communicates with the interior of the vacuum chamber and is configured to receive the cooling unit and the heating unit. The vacuum chamber defines a lifting axis along which the cooling unit and/or the heating unit and the lifting chamber are arranged, and the apparatus further comprises displacement means configured to displace the cooling unit and/or the heating unit along the lifting axis and between the vacuum chamber and the lifting chamber.

Find Patent Forward Citations

Derckx, Don. (2021). Apparatus for coating substrates (U.S. Patent No. 11131019). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11131019

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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