The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2021
Filed:
Mar. 11, 2020
Applicant:
Ricoh Company, Ltd., Tokyo, JP;
Inventors:
Assignee:
RICOH COMPANY, LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/14 (2006.01); B41J 2/165 (2006.01); H01L 41/187 (2006.01); H01L 41/25 (2013.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
B41J 2/14233 (2013.01); B41J 2/165 (2013.01); H01L 41/0973 (2013.01); H01L 41/1876 (2013.01); H01L 41/25 (2013.01); B41J 2002/14258 (2013.01);
Abstract
A piezoelectric thin-film element includes a diaphragm plate on a substrate; a lower electrode on the diaphragm plate; a piezoelectric film on the lower electrode, the piezoelectric film containing Pb; and an upper electrode on the piezoelectric film. The diaphragm plate is a laminate in which a silicon oxide layer, a silicon nitride layer, and an amorphous layer containing a metal oxide to trap Pb of the piezoelectric film are laminated in turn on the substrate. The amorphous layer has a thickness of preventing Pb of the piezoelectric film from reaching the silicon nitride layer.