Method for concentrating ozone gas and apparatus for concentrating ozone gas

Abstract

Provided is method for concentrating ozone gas the method including the steps of: allowing ozone gas to be adsorbed onto the adsorbent by introducing ozone gas-containing raw material mixed gas into an adsorption vessel () that houses an adsorbent for adsorbing ozone gas; reducing a pressure in a concentration vessel () in a state where the concentration vessel () does not communicate with the adsorption vessel (), the concentration vessel () being configured to be connected to the adsorption vessel () so as to be interswitchable between a state where the concentration vessel () communicates with the adsorption vessel () and a state where the concentration vessel does not communicate with the adsorption vessel (); and introducing concentrated mixed gas including ozone gas with a higher ozone gas concentration than the ozone gas concentration in the raw material mixed gas into the concentration vessel () by desorbing the ozone gas adsorbed onto the adsorbent using a pressure difference between the internal pressure of the concentration vessel () and an internal pressure of the adsorption vessel () in a state where the concentration vessel () having a reduced internal pressure communicates with the adsorption vessel () that houses the adsorbent onto which the ozone gas is adsorbed, and delivering the desorbed ozone gas into the concentration vessel (). Also provided is an apparatus () for concentrating ozone gas for implementing the method.