The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2021
Filed:
Oct. 17, 2017
Applicant:
Sumitomo Electric Industries, Ltd., Osaka, JP;
Inventors:
Koichi Kimura, Itami, JP;
Akira Mikumo, Itami, JP;
Assignee:
SUMITOMO ELECTRIC INDUSTRIES, LTD., Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); H05B 3/28 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67103 (2013.01); H01L 21/68757 (2013.01); H01L 21/68785 (2013.01); H05B 3/283 (2013.01); H01J 37/32724 (2013.01); H01J 2237/002 (2013.01); H01J 2237/2065 (2013.01); H01J 2237/24585 (2013.01); H01L 21/67248 (2013.01); H01L 21/6833 (2013.01);
Abstract
A wafer holder includes a mounting table that has a mounting surface for a workpiece at a top, a supporting member that supports the mounting table from a lower side, a first cylindrical member one end of which is joined hermetically to a lower surface of the mounting table, and a second cylindrical member that is provided inside the first cylindrical member and one end of which is joined hermetically to the lower surface of the mounting table.