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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11127569 B1

PDFFull Text
Date of Patent:
Sep. 21, 2021

Filed:

Jun. 22, 2018

Plasma-resistant member

Applicant:

Toto Ltd., Kitakyushu, JP;

Inventor:

Junichi Iwasawa, Kitakyushu, JP;

Assignee:

Toto Ltd., Fukuoka, JP;

Attorneys:

Carrier Blackman & Associates, P.C.

William D. Blackman

Joseph P. Carrier

Primary Examiner:

Daniel J Schleis

Assistant Examiner:

Kevin C T Li

Int. Cl.
CPC ...
C23C 16/505 (2006.01); C23C 4/10 (2016.01); C23C 24/04 (2006.01); H01L 21/3065 (2006.01); H01L 21/31 (2006.01); H01J 37/32 (2006.01); C23C 4/11 (2016.01); C23C 16/44 (2006.01); C23C 16/50 (2006.01); C01F 17/218 (2020.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32495 (2013.01); C01F 17/218 (2020.01); C23C 4/11 (2016.01); C23C 16/4404 (2013.01); C23C 16/50 (2013.01); C23C 24/04 (2013.01); C01P 2002/60 (2013.01); C01P 2002/76 (2013.01); C01P 2004/02 (2013.01); H01J 37/32715 (2013.01); H01L 21/67017 (2013.01); H01L 21/6831 (2013.01);
Abstract

A plasma-resistant member that includes a base material and a layer structural component is provided, wherein the layer structural component includes an yttria polycrystalline body, is formed at a surface of the base material, and has plasma resistance; crystallites that are included in the yttria polycrystalline body included in the layer structural component are not bonded to each other via a heterogenous phase; the yttria polycrystalline body included in the layer structural component has a crystal structure including only cubic, or a crystal structure in which cubic and monoclinic coexist; and an average value of a proportion of monoclinic to cubic inside the yttria polycrystalline body included in the layer structural component is greater than 0% and not more than 60%.

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