The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2021
Filed:
Jan. 15, 2020
Applicant:
Kkt Holdings Syndicate, Dover, DE (US);
Inventors:
Tzu-Yi Kuo, Taipei, TW;
Yu-Kuang Tseng, Taipei, TW;
Assignee:
KKT HOLDINGS SYNDICATE, Dover, DE (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01); H01J 37/244 (2006.01); H01J 37/145 (2006.01); H01J 37/147 (2006.01); H01L 21/687 (2006.01); H01J 37/20 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); H01J 37/145 (2013.01); H01J 37/1475 (2013.01); H01J 37/20 (2013.01); H01J 37/244 (2013.01); H01L 21/68785 (2013.01); H01J 2237/24475 (2013.01);
Abstract
An immersion objective lens is configured below a stage such that multiple detectors can be configured above sample for large beam current application, particularly for defect inspection. Central pole piece of the immersion objective lens thus can be provided that a magnetic monopole-like field can be provided for electron beam. Auger electron detector thus can be configured to analyze materials of sample in the defect inspection.