The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2021
Filed:
Dec. 10, 2019
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Yasuo Aoki, Zushi, JP;
Atsushi Hara, Yokohama, JP;
Takachika Shimoyama, Yokohama, JP;
Toru Kawaguchi, Kawasaki, JP;
Katsuhiro Shimatake, Toyama, JP;
Iori Noda, Kawasaki, JP;
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G01D 5/347 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70775 (2013.01); G03F 7/7085 (2013.01); G03F 7/70791 (2013.01); G03F 7/70833 (2013.01); G01D 5/34746 (2013.01);
Abstract
A liquid crystal exposure apparatus that exposes a substrate with an illumination light via a projection optical system is equipped with: a substrate holder that holds the substrate; a substrate encoder system that includes head units and scales, and acquires the position information of the substrate holder on the basis of the output of the head units; and a drive section that relatively moves one of the head units and the scales on the substrate holder with respect to the other.