The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 21, 2021

Filed:

Jul. 23, 2018
Applicant:

Microjet Technology Co., Ltd., Hsinchu, TW;

Inventors:

Hao-Jan Mou, Hsinchu, TW;

Shih-Chang Chen, Hsinchu, TW;

Jia-Yu Liao, Hsinchu, TW;

Shou-Hung Chen, Hsinchu, TW;

Hung-Hsin Liao, Hsinchu, TW;

Chiu-Lin Lee, Hsinchu, TW;

Mei-Yen Chen, Hsinchu, TW;

Chi-Feng Huang, Hsinchu, TW;

Yung-Lung Han, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B 45/047 (2006.01); G01N 33/00 (2006.01); G01N 1/22 (2006.01); B81B 3/00 (2006.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
F04B 45/047 (2013.01); B81B 3/0021 (2013.01); G01N 1/2273 (2013.01); G01N 33/0009 (2013.01); B81B 2201/036 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/053 (2013.01); F05B 2220/709 (2013.01); H01L 41/0926 (2013.01);
Abstract

An actuating and sensing module is disclosed and includes an actuating device, a first substrate, a second substrate, a valve membrane and a sensor stacked sequentially. The first substrate includes an intake channel, an exhaust channel, an inlet and an outlet. The valve membrane is disposed between the first substrate and the second substrate and includes an intake valve and an exhaust valve to insulate the intake channel and the exhaust channel, respectively. The actuating device is disposed to seal a through slot of the second substrate to form a compressing chamber. The inlet, the intake channel, the compressing chamber, the exhaust channel and the outlet are in communication with each other to define a gas flow loop. The sensor is disposed in the gas flow loop. While the actuating device drives gas from the outside, the gas is transported into the gas flow loop and sensed by the sensor.


Find Patent Forward Citations

Loading…