The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2021
Filed:
Oct. 19, 2015
Applicant:
Toshiba Mitsubishi-electric Industrial Systems Corporation, Chuo-ku, JP;
Inventors:
Takahiro Shirahata, Tokyo, JP;
Hiroyuki Orita, Tokyo, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/44 (2006.01); B05B 12/14 (2006.01); B05B 7/08 (2006.01); B05B 7/24 (2006.01); C23C 18/12 (2006.01); B05B 12/18 (2018.01); C23C 16/458 (2006.01); B05B 14/30 (2018.01); B05B 7/02 (2006.01); B05B 13/02 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45563 (2013.01); B05B 7/025 (2013.01); B05B 7/08 (2013.01); B05B 7/24 (2013.01); B05B 12/1472 (2013.01); B05B 12/18 (2018.02); B05B 13/0278 (2013.01); B05B 14/30 (2018.02); C23C 16/4401 (2013.01); C23C 16/4412 (2013.01); C23C 16/4586 (2013.01); C23C 16/45574 (2013.01); C23C 16/45595 (2013.01); C23C 18/1275 (2013.01); C23C 18/1279 (2013.01);
Abstract
A film forming device includes a bottom plate detachably provided on a bottom surface of a mist spray head. The bottom plate includes a raw material solution opening, reaction material openings, and inert gas openings formed in regions corresponding to a raw material solution ejection port, reaction material ejection ports, and inert gas ejection ports, when the bottom plate is attached to the bottom surface of the mist spray head.