The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 14, 2021

Filed:

Dec. 01, 2016
Applicant:

Denso Corporation, Kariya, JP;

Inventor:

Hiromitsu Tanabe, Kariya, JP;

Assignee:

DENSO CORPORATION, Kariya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/739 (2006.01); H01L 29/40 (2006.01); H01L 29/08 (2006.01); H01L 29/423 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7397 (2013.01); H01L 29/0804 (2013.01); H01L 29/0821 (2013.01); H01L 29/404 (2013.01); H01L 29/407 (2013.01); H01L 29/4236 (2013.01); H01L 29/739 (2013.01); H01L 29/7805 (2013.01); H01L 29/7813 (2013.01);
Abstract

A semiconductor device includes a semiconductor substrate having first and second main surfaces, a first region formed in a surface layer of the first main surface, a drift layer disposed adjacent to the first region, a charge accumulation region having a higher concentration than the drift region, and a trench gate including a trench penetrating the first region and the charge accumulation region, and a gate electrode formed in the trench. The trench gate includes a main trench having a gate electrode to which a gate voltage is applied, and a dummy trench having a gate electrode to which a voltage different from the main trench is applied. The main trench and the dummy trench sandwiches the charge accumulation region, and a contact area Sbetween the dummy trench and the charge accumulation region is larger than a contact area Sbetween the main trench and the charge accumulation region.


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