The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 14, 2021

Filed:

Aug. 29, 2014
Applicant:

Brooks Automation, Inc., Chelmsford, MA (US);

Inventors:

Daniel A. Hall, West Newbury, MA (US);

Glenn L. Sindledecker, Dracut, MA (US);

Matthew W. Coady, Hollis, NH (US);

Marcello Trolio, Billerica, MA (US);

Michael Spinazola, Wilmington, MA (US);

Assignee:

BROOKS AUTOMATION, INC., Chelmsford, MA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01); B65G 47/34 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67775 (2013.01); B65G 47/34 (2013.01); H01L 21/67265 (2013.01); H01L 21/67379 (2013.01); H01L 21/67772 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A substrate loading device having a frame, a cassette support, and a user interface. The frame is connected to a substrate processing apparatus. The frame has a transport opening through which substrates are transported between the device and processing apparatus. The cassette support is connected to the frame for holding at least one substrate holding cassette. The user interface is arranged for inputting information, and is mounted to the frame so that the user interface is integral with the frame.


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