The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 14, 2021

Filed:

Dec. 18, 2018
Applicant:

Murata Machinery, Ltd., Kyoto, JP;

Inventors:

Wataru Kitamura, Inuyama, JP;

Tetsuya Kuwahara, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01); B65G 1/04 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67769 (2013.01); H01L 21/67276 (2013.01); B65G 1/04 (2013.01);
Abstract

A method for controlling a conveyance system includes transmitting, by a specific conveyance vehicle specific transfer location information to a management device, extracting from correspondence information by the management device, specific communication-device address information corresponding to the specific transfer location information received from the specific conveyance vehicle, and transmitting to the specific conveyance vehicle by the management device the specific communication-device address information extracted, and executing by the specific conveyance vehicle using the specific communication-device address information received from the management device communication with a first communication device connected to a first semiconductor manufacturing device to transfer a FOUP between the first semiconductor manufacturing device and the specific conveyance vehicle.


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