The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2021
Filed:
Aug. 31, 2018
Screen Holdings Co., Ltd., Kyoto, JP;
Takayoshi Tanaka, Kyoto, JP;
Akira Oato, Kyoto, JP;
SCREEN HOLDINGS CO., LTD., Kyoto, JP;
Abstract
A liquid of a hydrophobizing agent is supplied to a surface of a substrate to form a liquid film of the hydrophobizing agent that covers an entire surface region of the substrate. Thereafter, a liquid amount of the hydrophobizing agent on the substrate is decreased while maintaining a state in which the entire surface region of the substrate is covered with the liquid film of the hydrophobizing agent. Thereafter, the liquid of the hydrophobizing agent on the substrate is replaced with a liquid of the first organic solvent by supplying the liquid of the first organic solvent to the surface of the substrate covered with the liquid film of the hydrophobizing agent in a state in which the liquid amount of the hydrophobizing agent on the substrate has decreased. Thereafter, the substrate is dried.