The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2021
Filed:
Aug. 06, 2019
Semes Co., Ltd., Cheonan-si, KR;
Jae-Youl Kim, Yongin-si, KR;
Jeeyong Jung, Cheonan-si, KR;
Young Ho Seo, Cheonan-si, KR;
Dae Sung Kim, Cheonan-si, KR;
Beomjeong Oh, Cheonan-si, KR;
Kwangbok Jun, Cheonan-si, KR;
Hyungoo Kwon, Anseong-si, KR;
Sanguk Son, Suwon-si, KR;
Abstract
An apparatus for supplying chemical liquid may include a chemical liquid discharging member, a reservoir, a chemical liquid supplying member and a chemical liquid circulating member. The chemical liquid discharging member may discharge a chemical liquid onto a substrate. The reservoir may store the chemical liquid supplied to the chemical liquid discharging member. The chemical liquid supplying member may supply the chemical liquid stored in the reservoir. The chemical liquid circulating member may circulate the chemical liquid from the chemical liquid discharging member to the reservoir.