Micro-electronic electrode assembly

Abstract

A micro-electronic electrode assembly having a first electrode arranged on a substrate is provided, wherein the first electrode has a thin layer made of a first electrode material having a solid state lattice, wherein the first electrode material oxidizes upon contact with oxygen-containing compounds and has a perovskite or perovskite-derived crystal structure, and wherein the electrode has a functional surface facing away from the substrate, a separation layer is arranged on the functional surface of the electrode, which prevents an oxidation of the electrode material in the region of the functional surface, the oxidation changing the properties of the electrode. An electrically insulating functional layer is arranged on the separation layer and a second electrode is arranged on the electrically insulating functional layer. According to the invention, advantageously the first electrode material has one of the compounds SrMoO3, SrMoO3-aNa BaMoO3, SrVO3, Of Sr2MoO4, and the separation layer has one of the compounds SeTiO3, DyScO3, GdScO3 or SrHfO3. The functional layer is a compound with the molecular formula BaxSr1−xTi1±yO3±z, preferably Ba0.5Sr0.5TiO3. The electrode assembly forms a varactor.